MIRA3 AMU is a high performance FE-SEM system equipped with an extraordinarily large chamber. This unique microscope allows the imaging and analysis of extraordinary large samples that cannot be fitted in standard chambers.
For this purpose, TESCAN offers the MIRA3 AMU, a unique FE-SEM that stands out for its capabilities to accommodate extremely large and heavy samples making SEM analysis of such large samples possible.



MIRA3 AMU brochure

Download MIRA3 brochure!

PDF – 6.1 MB


  • SEM imaging of extremely large samples that cannot be altered (cut into smaller pieces)
  • Chamber internal dimensions: 880 mm (width) × 1200 mm (depth)
  • Maximum specimen weight: 25 kg
  • Integrated active vibration isolation
  • Capable of low and high vacuum operations
  • Multiple detector configuration possible


  • Life Sciences
    large biological specimens imaging, analysis of whole bones
  • Materials science
    characterisation of whole large samples, wearing and fatigue studies, failure analysis, forensics
  • Earth sciences
    study and characterisation of minerals, whole rocks and valuable geological samples whose integral structure must be preserved for the analysis
  • Semiconductors and Microelectronics
    large wafer SEM inspection (maximum sample diameter 30”)


Internal Size 880 mm (width) x 1200 mm (depth)
Max. Specimen Diameter 762 mm (30") and height 127 mm (5")
Max. Specimen Weight 25 kg
Stage Movement X = 410 mm
Y = 50 mm
Z = 65 mm
Stage Type fully Motorized


Semiconductors & Microelectronics

Semiconductors & Microelectronics

Material Science

Material Sciences

Life Sciences

Life Sciences

Earth Sciences

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