Extraordinary Ultra-High Resolution imaging and extremely precise nanoengineering.
The preparation of high-quality ultra-thin TEM lamella, delayering processes in technology nodes, precise nanopatterning or high-resolution 3D reconstructions are just some of the applications in which GAIA3 excels.



GAIA3 brochure

Extraordinary Ultra-High Resolution imaging and extremely precise nanoengineering. Download GAIA3 brochure!

PDF – 6.1 MB


Triglav™ - newly designed UHR electron column

  • TriLens™ - objective system: unique combination of three-lens objective and crossover-free beam path
  • Advanced detection system with multiple SE and BSE detectors - TriSE™ and TriBE™
  • Triglav™ - Ultimate ultra-high resolution at low beam energy: 1 nm at 1 keV and 0.7 nm at 15 keV
  • Electron beam currents up to 400 nA and rapid beam energy changes
  • Optimised column geometry for accommodating large wafers up to 8”


Electron Optics
Electron Gun High brightness Schottky emitter
Standard mode In-Beam SE 0.7nm at 15keV
1.4nm at 1keV
1.7nm at 500eV
Beam Deceleration Mode
1.0nm at 1 keV - SE (BDM)
Magnification at 30keV 4 x - 1,000,000 x
Probe Current 2 pA to 400 nA

Cobra FIB column

High-performance Ga FIB column for ultimate precision in nanoengineering.

  • Probe current: 1 pA 50 nA
  • Resolution: < 2.5 nm at 30 kV at SEM-FIB coincidence point
  • Cobra guarantees the shortest time to result in cross-sectioning and TEM sample preparation
  • Ideal for 3D ultra-structural studies of biological specimens such as tissue and whole cells
  • Excellent performance at low kV ideal for polishing ultra-thin lamella and for reducing amorphous layers

Ion Optics

Ion column Cobra
Ion Gun Ga LIMS
Resolution <2.5 nm at 30Kev (at SEM-FIB coincidence point)
Probe current 1 pA to 50nA
Accelerating Voltage 0.5kV to 30kV
Magnification Minimum 150 × at coincidence point and 10 kV (corresponding to 1 mm field of view), maximum 1,000,000 ×
SEM-FIB coincidence at WD 5 mm for SEM – WD 12 mm for FIB
SEM-FIB angle 55°


Semiconductors & Microelectronics

Semiconductors & Microelectronics

Material Science

Material Sciences

Life Sciences

Life Sciences

Earth Sciences

브로슈어 신청

문의내용을 입력해 주세요.