Newly designed electron column for superb Ultra-High Resolution.
The MAIA3 model 2016 is an ultra-high resolution SEM with excellent imaging capabilities in the whole range of beam energies.



MAIA3 brochure

MAIA3? - Newly designed ultra-high resolution electron column for superb imaging.
Download the brochure!

PDF – 6.1 MB


Triglav™ - newly designed UHR electron column

  • TriLens™ - objective system: unique combination of three-lens objective and crossover-free beam path
  • Advanced detection system with multiple SE and BSE detectors TriSE™ and TriBE™
  • Triglav™ - Ultimate ultra-high resolution at low beam energy: 1 nm at 1 keV and 0.7 nm at 15 keV
  • Electron beam currents up to 400 nA and rapid beam energy changes
  • Triple BSE detection TriBE™ for angle-selective signal collection. The Mid-Angle BSE and In-Beam LE-BSE detectors are located inside the column and detect medium-angle and axial backscattered electrons, while the In-Chamber BSE Detector detects wide-angle electrons. Together, they deliver a variety of imaging contrasts and enable low-energy detection down to 200 eV.
  • Triple SE detection TriSE™ to capture SE signal optimally in all working modes. The In-Beam SE detector inside the column enables detection of electrons at very short working distances. SE detector for beam deceleration mode gives ultimate resolution in BDM. The In-Chamber SE detector delivers superb topographic contrast.
  • Beam Deceleration Technology (BDT) for excellent resolution at very low beam energies down to 50 eV (optional)


Electron Optics
Electron Gun High brightness Schottky emitter
Standard mode In-Beam SE 0.7nm at 15keV
1.4nm at 1keV
1.7nm at 500eV
Beam Deceleration Mode
1.0nm at 1 keV - SE (BDM)
Magnification at 30keV 4 x - 1,000,000 x
Probe Current 2 pA to 400 nA


Semiconductors & Microelectronics

Semiconductors & Microelectronics

Material Science

Material Sciences

Life Sciences

Life Sciences

Earth Sciences

브로슈어 신청

문의내용을 입력해 주세요.