MIRA3 AMU
MIRA3 AMU is a high performance FE-SEM system equipped with an extraordinarily large chamber. This unique microscope allows the imaging and analysis of extraordinary large samples that cannot be fitted in standard chambers.
For this purpose, TESCAN offers the MIRA3 AMU, a unique FE-SEM that stands out for its capabilities to accommodate extremely large and heavy samples making SEM analysis of such large samples possible.
For this purpose, TESCAN offers the MIRA3 AMU, a unique FE-SEM that stands out for its capabilities to accommodate extremely large and heavy samples making SEM analysis of such large samples possible.
PRODUCT BROCHURE
MIRA3 AMU brochure
Download MIRA3 brochure!
PDF – 6.1 MB
KEY FEATURES
- SEM imaging of extremely large samples that cannot be altered (cut into smaller pieces)
- Chamber internal dimensions: 880 mm (width) × 1200 mm (depth)
- Maximum specimen weight: 25 kg
- Integrated active vibration isolation
- Capable of low and high vacuum operations
- Multiple detector configuration possible
Applications
- Life Sciences
large biological specimens imaging, analysis of whole bones - Materials science
characterisation of whole large samples, wearing and fatigue studies, failure analysis, forensics - Earth sciences
study and characterisation of minerals, whole rocks and valuable geological samples whose integral structure must be preserved for the analysis - Semiconductors and Microelectronics
large wafer SEM inspection (maximum sample diameter 30”)
Specification
| Internal Size | 880 mm (width) x 1200 mm (depth) |
|---|---|
| Max. Specimen Diameter | 762 mm (30") and height 127 mm (5") |
| Max. Specimen Weight | 25 kg |
| Stage Movement | X = 410 mm Y = 50 mm Z = 65 mm |
| Stage Type | fully Motorized |
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Application
Semiconductors & Microelectronics
Material Science
Life Sciences
Earth Sciences
