KEY FEATURES

Triglav™ - newly designed UHR electron column

• - Unique in-beam detection design: TriBE™ and TriSE™ for advanced sample nanocharacterization
• - Advanced detection system with multiple SE and BSE detectors TriSE™ and TriBE™
• - Triglav™ - Ultimate ultra-high resolution at low beam energy: 0.9 nm at 1 keV and 0.6 nm at 15 keV
• - Electron beam currents up to 400 nA and rapid beam energy changes
• - Triple BSE detection TriBE™ for angle-selective signal collection. The Mid-Angle BSE and In-Beam LE-BSE detectors are located inside the column and detect medium-angle and axial backscattered electrons, while the In-Chamber BSE Detector detects wide-angle electrons. Together, they deliver a variety of imaging contrasts and enable low-energy detection down to 200 eV.
• - Triple SE detection TriSE™ to capture SE signal optimally in all working modes. The In-Beam SE detector inside the column enables detection of electrons at very short working distances. SE detector for beam deceleration mode gives ultimate resolution in BDM. The In-Chamber SE detector delivers superb topographic contrast.
• - Beam Deceleration Technology (BDT) for excellent resolution at very low beam energies down to 200 eV (optional)
• - Intuitive Essence™ modular software platform designed for effortless operation regardless user’s experience level