Newly designed electron column for superb Ultra-High Resolution. The MAGNA is an ultra-high resolution SEM with excellent imaging capabilities in the whole range of beam energies.
MAGNA - Newly designed ultra-high resolution electron column for superb imaging. Download the brochure!
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Triglav™ - newly designed UHR electron column
- Unique in-beam detection design: TriBE™ and TriSE™ for advanced sample nanocharacterization
- Advanced detection system with multiple SE and BSE detectors TriSE™ and TriBE™
- Triglav™ - Ultimate ultra-high resolution at low beam energy: 0.9 nm at 1 keV and 0.6 nm at 15 keV
- Electron beam currents up to 400 nA and rapid beam energy changes
- Triple BSE detection TriBE™ for angle-selective signal collection. The Mid-Angle BSE and In-Beam LE-BSE detectors are located inside the column and detect medium-angle and axial backscattered electrons, while the In-Chamber BSE Detector detects wide-angle electrons. Together, they deliver a variety of imaging contrasts and enable low-energy detection down to 200 eV.
- Triple SE detection TriSE™ to capture SE signal optimally in all working modes. The In-Beam SE detector inside the column enables detection of electrons at very short working distances. SE detector for beam deceleration mode gives ultimate resolution in BDM. The In-Chamber SE detector delivers superb topographic contrast.
- Beam Deceleration Technology (BDT) for excellent resolution at very low beam energies down to 200 eV (optional)
- Intuitive Essence™ modular software platform designed for effortless operation regardless user’s experience level
High brightness Schottky emitter
Standard mode In-Beam SE
0.6 nm at 15 keV 1.2 nm at 1 keV
0.5 nm at 30 keV
Beam Deceleration Mode (Option)
0.9 nm at 1 keV - SE (BDM)
Magnification at 30keV
4 x - 2,000,000 x
2 pA to 400 nA
Semiconductors & Microelectronics
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