KEY FEATURES

• - High brightness Schottky emitter for high-resolution/high current/low-noise imaging
• - Unique four-lens Wide Field Optics™ design offering a variety of working and displaying modes embodying the TESCAN proprietary Intermediate Lens (IML) for the beam aperture optimization.
• - The proprietary Intermediate Lens (IML) that works as an "Aperture Changer" makes the exchange of the effective final aperture in an electromagnetic way
• - Real-time In-Flight Beam Tracing™ for performance and beam optimization, which also allows direct and continuous control of the beam and beam current Beam Deceleration Technology (BDT) for excellent resolution at low beam voltages.
• - Excellent imaging at short working distances with the powerful In-Beam detector (optional)
• - All MIRA chambers provide superior specimen handling using a 5-axis fully motorized compucentric stage and have ideal geometry for EDX and EBSD
• - Optional extra-large chambers (GM) with robust stages able to accommodate large samples including large wafers (6", 8", 12") are also available