CLARA
Field-free analytical UHR SEM for materials characterization at the nanoscale
KEY FEATURES
Universality in sample imaging with field-free ultra-high resolution Optics
- - The BrightBeam™ SEM column delivers field-free ultra-high resolution imaging (0.9 nm at 15 keV, 1.3 nm at 1 keV) while maintaining universality in sample imaging and analysis.
- - Excellent imaging performance at low-beam energies ideal for imaging non-conducting samples and uncoated biological specimens. A low vacuum mode is also available.
- High electron beam currents up to 400 nA are advantageous for microanalytical techniques such as CL, EDX, WDX and EBSD. - - Detection system with angle-selective and energy-filtering capabilities give complete control of surface sensitivity and the option to explore with different contrast.
Specification
Electron Optics | |
---|---|
Electron Gun | High Brightness Schottky Emitter |
SE | 0.9 nm at 15 keV |
Beam Deceleration mode (option) | 1.2 nm at 1 keV |
Magnification | 2x - 1,000,000x |
Accelerating Voltage | 50 eV to 30 keV |
Probe Current | 2 pA to 400nA |