Electron Microscope

VEGA

VEGA is a thermionic emission SEM system that comes either with tungsten heated filament source.


VEGA

PRODUCT BROCHURE

4rd Generation of VEGA SEMs brochure

Download VEGA Brochure!

PDF – 6.1 MB


KEY FEATURES

  • - Unique four-lens Wide Field Optics™ design offering the variety of working and displaying modes embodying the TESCAN proprietary Intermediate Lens (IML) for the beam aperture optimisation.
  • - The proprietary Intermediate Lens (IML) that works as an „Aperture Changer“ makes the exchange of the effective final aperture in an electromagnetic way
  • - Real time In-Flight Beam Tracing™ for the performance and beam optimisation integrating the well-established software Electron Optical Design
  • - The column construction, without any mechanical centring elements, allows fully automated column set-up and alignment
  • - Superior specimen handling using a fully motorized compucentric stage
  • - TESCAN VEGA microscopes can be configured in 4 different chamber sizes: SB, LM, XM, and GM. These chambers are fitted with a variety of ports and designed with optimal geometry for EDX, WDX and EBSD analysis.

Specification

Electron Gun

Tungsten heated cathode

Resolution
SE

3nm at 30keV

BSE

3.5nm at 30keV

Magnification

2x - 1,000,000x

Accelerating Voltage200eV to 30keV
Probe Current1pA to 2μA
Image size16,384 x 16,384 pixels


Application

Semiconductors & Microelectronics

Semiconductors & Microelectronics

Material Science

Material Sciences

Life Sciences

Life Sciences

Earth Sciences

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