VEGA3 is a thermionic emission SEM system that comes either with tungsten heated filament or lanthanum hexaboride (LaB6) as electron source.
3rd Generation of VEGA SEMs brochure
Download VEGA3 Brochure!
PDF – 6.1 MB
Unique four-lens Wide Field Optics™ design offering the variety of working and displaying modes embodying the TESCAN proprietary Intermediate Lens (IML) for the beam aperture optimisation.
The proprietary Intermediate Lens (IML) that works as an „Aperture Changer“ makes the exchange of the effective final aperture in an electromagnetic way
Real time In-Flight Beam Tracing™ for the performance and beam optimisation integrating the well-established software Electron Optical Design
The column construction, without any mechanical centring elements, allows fully automated column set-up and alignment
Superior specimen handling using a fully motorized compucentric stage
VEGA3 microscopes can be configured in 4 different chamber sizes: SB, LM, XM, and GM. These chambers are fitted with a variety of ports and designed with optimal geometry for EDX, WDX and EBSD analysis.
서울 금천구 가산동 서부샛길 606 대성디폴리스 A-802 (주)테스칸코리아 대표자 : 김재환 l 사업자등록번호 : 109-81-97174 l 개인정보책임자 : 정옥윤 l TEL : 02-861-8056 l FAX : 02-861-8066 l 이메일 : firstname.lastname@example.org Copyright ⓒ (주)테스칸코리아. ALL Rights Reserved. [[개인정보취급방침]]