VEGA
VEGA is a thermionic emission SEM system that comes either with tungsten heated filament source.
KEY FEATURES
- - Unique four-lens Wide Field Optics™ design offering the variety of working and displaying modes embodying the TESCAN proprietary Intermediate Lens (IML) for the beam aperture optimisation.
- - The proprietary Intermediate Lens (IML) that works as an „Aperture Changer“ makes the exchange of the effective final aperture in an electromagnetic way
- - Real time In-Flight Beam Tracing™ for the performance and beam optimisation integrating the well-established software Electron Optical Design
- - The column construction, without any mechanical centring elements, allows fully automated column set-up and alignment
- - Superior specimen handling using a fully motorized compucentric stage
- - TESCAN VEGA microscopes can be configured in 4 different chamber sizes: SB, LM, XM, and GM. These chambers are fitted with a variety of ports and designed with optimal geometry for EDX, WDX and EBSD analysis.
Specification
Electron Gun | Tungsten heated cathode |
---|---|
Resolution | |
SE | 3nm at 30keV |
BSE | 3.5nm at 30keV |
Magnification | 2x - 1,000,000x |
Accelerating Voltage | 200eV to 30keV |
Probe Current | 1pA to 2μA |
Image size | 16,384 x 16,384 pixels |