LYRA3 is a dual beam system that combines a high-resolution FE-SEM column with a versatile high-performance Ga ion source FIB.
LYRA3 is an excellent choice for preparing cross-sections, site-specific high-quality TEM lamella and, high-resolution FIB-SEM tomography for 3D sample reconstructions.



LYRA3 brochure

Focused ion beam scanning electron microscope for high-performance in nanoengineering. Download LYRA3 brochure!

PDF – 6.1 MB


High Performance Electron Optics

  • High brightness Schottky emitter for high-resolution/high current/low-noise imaging
  • Unique Wide Field Optics™ design with a proprietary Intermediate Lens (IML) offering a variety of working and displaying modes, for instance with enhanced field of view or depth of focus, etc.
  • Real time In-Flight Beam Tracing™ for performance and beam optimization, integrated with the well-established software Electron Optical Design. It also includes a direct and continuous control of the beam spot size and beam current.
  • Beam Deceleration Technology (BDT) for excellent resolution at low beam voltages·
  • Excellent imaging at short working distances with the powerful In-Beam detector (optional)
  • All MIRA3 chambers provide superior specimen handling using a 5-axis fully motorized compucentric stage and have ideal geometry for EDX and EBSD
  • Optional extra-large chambers (XM, GM) with robust stages able to accommodate large samples including large wafers (6", 8", 12") are also available


Electron Optics
Electron Gun High Brightness Schottky Emitter
SE 1.2nm at 30keV / 1nm at 30keV (Optional In-Beam detector)
1.5nm at 3keV (Optional Beam Deceleration Mode)
BSE 2.0nm at 30keV
Magnification 1x - 1,000,000x
Accelerating Voltage 200eV to 30keV / 50eV to 30kV with BDM option
Probe Current 2pA to 200nA (Optional 2pA to 400nA)
Stage 5-axis fully Compucentric stage

High Performance Ion Optics

  • Sophisticated high performance CANION-FIB system for fast and precise cross-sectioning and TEM sample preparation.
  • Optional ultra-high resolution COBRA-FIB column represents the highest level of technology in terms of resolution both for imaging and milling. This is one of the most precise FIB instruments for nano-engineering in the world.

Ion Optics

Ion Gun Cobra Canion
Ion Column Ga LIMS
Resolution 2.5nm at 30kV 5.0nm at 30kV
at SEM-FIB coincidence point
Probe current 1pA to 50nA 1pA to 40nA
Accelerating Voltage 0.5kV to 30kV
Magnification Minimum 150 × at coincidence point and 10 kV (corresponding to 1 mm field of view), maximum 1,000,000 ×/td>
SEM-FIB angle 55°


Semiconductors & Microelectronics

Semiconductors & Microelectronics

Material Science

Material Sciences

Life Sciences

Life Sciences

Earth Sciences

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